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国家对集成电路行业的投入引来电子级化学品的快速发展。正硅酸甲酯（TMOS）广泛应用于化工、光学玻璃、电子电气等诸多领域。介绍工业级与电子级TMOS的质量，概述工业级和电子级TMOS制备工艺研究进展，以期为电子级TMOS的制备工艺提供技术思路。
Abstract：The national investment in the integrated circuit industry has led to rapid development in electronic grade chemicals. TMOS is widely used in various fields such as chemical, optical glass, electronic and electrical field. The quality of industrial grade and electronic grade TMOS are introduced, the research progress on industrial grade and electronic grade TMOS production are focused on,aiming to provide technical ideas for the preparation process of electronic grade TMOS.
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基本信息:
DOI：
中图分类号:TQ264.1
引用信息:
[1]胡国涛,黄家兴,柳陈军等.正硅酸甲酯制备的研究进展[J].生态产业科学与磷氟工程,2024,39(12):50-55.
基金信息:
电子级磷酸多级耦合纯化关键技术研究（黔科合支撑[2023]一般408）